Electronic device with composite substrate
NRL
A method for making a multilayered electronic device with at least one epitaxial layer grown on a single-crystal film bonded to a composite wherein at least one layer is polycrystalline, the method includes the step of bonding a single-crystal film at least one of the epitaxial layers on the single-crystal film wherein thermal coefficients of expansion for the substrate and the epitaxial layer are closely matched.
Inventors:
Kub, Francis J.; Hobart, Karl D.
Patent Number:
Technical domain:
Materials and Coatings
FIle Date:
2001-01-19
Grant Date:
2002-12-24
Grant time:
704 days
Grant time percentile rank:
12
Claim count percentile rank:
11
Citations percentile rank:
1
'Cited by' percentile rank:
8
Assignee:
US NAVY
