Maryland's Defense Patent Database

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Method for making electro-optical devices using a hydrogenion splitting technique

Patent image
NRL

A method is provided for transferring an electro-optical layer grown on a growth substrate to a handle substrate. The method includes implanting hydrogen ions in the transfer substrate to form an intermediate hydrogen ion implant layer and bonding the transfer substrate to the handle substrate to form a joined structure. The joined structure is heated to a temperature sufficient to split the joined structure to thereby transfer a portion of the electro-optical layer to the handle substrate.

Inventors: 
Kub, Francis J.; Hobart, Karl D.
Patent Number: 
Technical domain: 
Materials and Coatings
FIle Date: 
2001-10-29
Grant Date: 
2003-07-15
Grant time: 
624 days
Grant time percentile rank: 
11
Claim count percentile rank: 
7
Citations percentile rank: 
2
'Cited by' percentile rank: 
3
Assignee: 
US NAVY