Maryland's Defense Patent Database

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Deposition of thin films using an infrared laser

Patent image
NRL

This invention pertains to transfer of a solid target material onto a substrate by vaporizing the material by irradiating it with intense light of a resonant vibrational mode of the material and depositing the vaporized material on a substrate in a solid form.

Inventors: 
Bubb, Daniel; Horwitz, James; Callahan, John; Haglund Jr., Richard; Papantonakis, Michael
Patent Number: 
Technical domain: 
Materials and Coatings
FIle Date: 
2002-01-29
Grant Date: 
2006-02-14
Grant time: 
1,477 days
Grant time percentile rank: 
27
Claim count percentile rank: 
3
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US NAVY