Deposition of thin films using an infrared laser
NRL
This invention pertains to transfer of a solid target material onto a substrate by vaporizing the material by irradiating it with intense light of a resonant vibrational mode of the material and depositing the vaporized material on a substrate in a solid form.
Inventors:
Bubb, Daniel; Horwitz, James; Callahan, John; Haglund Jr., Richard; Papantonakis, Michael
Patent Number:
Technical domain:
Materials and Coatings
FIle Date:
2002-01-29
Grant Date:
2006-02-14
Grant time:
1,477 days
Grant time percentile rank:
27
Claim count percentile rank:
3
Citations percentile rank:
1
'Cited by' percentile rank:
1
Assignee:
US NAVY
