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Sample-stand for scanning electron microscope

Patent image
NSA

The present invention is a sample-stage for a scanning electron microscope. The sample stage has a U-shaped base, horizontally oriented with the closed end forming the right side. A bottom member abuts the bottom of the U-shaped base, forming an interior cavity with the U-shaped base. An angled support member abuts the top of the U-shaped base farthest from the right side for holding a sample at a user-defined angle. A first reflector abuts a portion of the interior right side of the U-shaped base, and a second reflector abuts a portion of the top surface of the bottom member. A beam stop abuts a portion of the right side of the U-shaped base.

Inventors: 
Vanderlinde, William Edward
Patent Number: 
Technical domain: 
Electronics and Energy
FIle Date: 
2004-10-04
Grant Date: 
2006-02-28
Grant time: 
512 days
Grant time percentile rank: 
9
Claim count percentile rank: 
4
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
NATIONAL SECURITY AGENCY