Maryland's Defense Patent Database

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Fiber optic pressure sensor

Patent image
NRL

A fiber optic pressure sensor includes an optical fiber for transmitting light. The optical fiber has an axis. The fiber optic pressure sensor also includes an etched diaphragm perpendicular to the axis. The diaphragm includes an operative side located at a distance from the optical fiber sufficient to reflect a portion of the transmitted light into the optical fiber. The etched diaphragm includes a semiconductor, a dielectric, and/or a metal.

Inventors: 
Lagakos, Nicholas; Bucaro, Joseph A.; Jarzynski, Jacek
Patent Number: 
Technical domain: 
Sensors and Measurement
FIle Date: 
2004-08-24
Grant Date: 
2006-12-12
Grant time: 
840 days
Grant time percentile rank: 
15
Claim count percentile rank: 
15
Citations percentile rank: 
1
'Cited by' percentile rank: 
2
Assignee: 
US NAVY