Maryland's Defense Patent Database

The defense community in Maryland is an R&D powerhouse.

Use this database to see the innovative patents that are poised for commercialization.

Microelectromechanical resonant photoacoustic cell

Patent image
ARL

An integrated photoacoustic spectroscopy (PAS) cell is fabricated using microelectromechanical (MEMS) techniques. The multi-layer structure includes an inner layer with a patterned resonant cavity disposed between top and bottom outer layers and a microphone acoustically coupled to the resonant cavity. In the preferred embodiment, the microphone is a piezoelectric thin-film membrane formed on one of the outer layers. The inner layer is additionally patterned to include buffer cavities on either side of the resonant cavity, and one or both of the top and bottom outer layers are also patterned to include buffer cavities aligned with the buffer cavities in the inner layer on either side of the resonant cavity. The preferred fabrication method involves joining an inner silicon substrate to a pair of outer silicon substrates, thereby encapsulating the resonant cavity, and depositing a piezoelectric thin film onto one of the outer substrates which is then patterned to create an acoustic sensor.

Inventors: 
Polcawich, Ronald G.; Pellegrino, Paul
Patent Number: 
Technical domain: 
Biotechnology and Healthcare
FIle Date: 
2003-11-19
Grant Date: 
2007-12-04
Grant time: 
1,476 days
Grant time percentile rank: 
27
Claim count percentile rank: 
1
Citations percentile rank: 
2
'Cited by' percentile rank: 
2
Assignee: 
US ARMY