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Lateral piezoelectric driven highly tunable micro-electromechanical system (MEMS) inductor

Patent image
CCDC ARL

A MEMS device comprising a substrate; an anchored end connected to the substrate; and an actuator comprising a first electrode; a piezoelectric layer over the first electrode; and multiple sets of second electrodes over the piezoelectric layer, wherein each of the sets of second electrodes being defined by a transverse gap there between, and wherein one of the sets of second electrodes are actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane. The device further comprises an end effector opposite to the anchored end and connected to the actuator; a ferromagnetic core support structure connected to the end effector; a movable ferromagnetic inductor core on top of the ferromagnetic core support structure; and a MEMS inductor coiled around the ferromagnetic core support structure and the movable ferromagnetic inductor core.

Inventors: 
Pulskamp, Jeffrey S.
Patent Number: 
Technical domain: 
Electronics and Energy
FIle Date: 
2007-11-08
Grant Date: 
2009-02-03
Grant time: 
453 days
Grant time percentile rank: 
8
Claim count percentile rank: 
6
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US ARMY