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Piezoelectric in-line RF MEMS switch and method of fabrication

Patent image
ARL

A MEMS switch and method of fabrication comprises a RF transmission line; a RF beam structure comprising a RF conductor; a cantilevered piezoelectric actuator coupled to the RF beam structure; a plurality of air bridges connected to the cantilevered piezoelectric actuator; and a plurality of contact dimples on the pair on the RF beam structure. The RF transmission line comprises a pair of co-planar waveguide ground planes flanking the RF conductor; and a plurality of ground straps, wherein the RF transmission line is operable to provide a path along which RF signals propagate. The cantilevered piezoelectric actuator comprises a dielectric layer connected to the RF beam structure; a bottom electrode connected to the dielectric layer; a top electrode; and a piezoelectric layer in between the top and bottom electrodes, wherein the top electrode is offset from an edge of the piezoelectric layer and the bottom electrode.

Inventors: 
Pulskamp, Jeffrey S.; Polcawich, Ronald G.; Judy, Daniel C.
Patent Number: 
Technical domain: 
Communications
FIle Date: 
2006-02-06
Grant Date: 
2009-04-14
Grant time: 
1,163 days
Grant time percentile rank: 
21
Claim count percentile rank: 
7
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US ARMY