Maryland's Defense Patent Database

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RF MEMS series switch using piezoelectric actuation and method of fabrication

Patent image
CCDC ARL

A microelectromechanical system (MEMS) switch comprising a radio frequency (RF) transmission line; a structurally discontinuous RF conductor adjacent to the RF transmission line; a pair of cantilevered piezoelectric actuators flanking the RF conductor; a contact pad connected to the pair of cantilevered piezoelectric actuators; a pair of cantilevered structures connected to the RF conductor; a plurality of air bridges connected to the pair of cantilevered piezoelectric actuators; and a plurality of contact dimples on the contact pad. Preferably, the RF transmission line comprises a pair of co-planar waveguide ground planes flanking the RF conductor; and a plurality of ground straps connected to the pair of co-planar waveguide ground planes, wherein the RF transmission line is operable to provide a path along which RF signals propagate.

Inventors: 
Pulskamp, Jeffrey S.; Polcawich, Ronald G.; Judy, Daniel
Patent Number: 
Technical domain: 
Communications
FIle Date: 
2006-09-07
Grant Date: 
2009-05-12
Grant time: 
978 days
Grant time percentile rank: 
17
Claim count percentile rank: 
7
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US ARMY