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Microelectro-mechanical chemical sensor

Patent image
NRL

A microelectro-mechanical chemical sensor includes an active cantilever beam having a chemically selective material layer disposed thereon and at least one, preferably two, resistors with the resistance corresponding to the cantilever beam deflection. The sensor also has at least two, and preferably four, auxiliary cantilever beams adjacent to the active cantilever and attached to the same substrate, each having a piezoresistor disposed thereon. The piezoresistors are elements of a Wheatstone bridge, and the Wheatstone bridge output indicates the amount of a predetermined target chemical sorbed by the chemically selective material layer. The sensor is electrostatically actuated in order to monitor the resonant frequency.

Inventors: 
Mcgill, Robert Andrew; Voiculescu, Ioana; Fedder, Gary K.
Patent Number: 
Technical domain: 
Sensors and Measurement
FIle Date: 
2005-05-25
Grant Date: 
2009-07-07
Grant time: 
1,504 days
Grant time percentile rank: 
27
Claim count percentile rank: 
7
Citations percentile rank: 
2
'Cited by' percentile rank: 
2
Assignee: 
US NAVY