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PZT MEMS resonant Lorentz force magnetometer

Patent image
CCDC ARL

A MEMS magnetometer comprises a deflectable resonator comprising a base layer; a Lorentz force (LF) drive conductor attached to the base layer; and a piezoelectric sensor attached to the base layer and electrically isolated from the LF drive conductor. The LF drive conductor comprises conductive material configured for receiving a current at a mechanical resonant frequency of the device capable of causing mechanical deformation of the deflectable resonator, wherein the current causes formation of Lorentz forces in a presence of a magnetic field, and wherein the deflectable resonator is mechanically deformed as a result of the formation of the Lorentz forces. The mechanical deformation of the deflectable resonator generates a detectable piezoelectric electrical signal that is proportional to the magnitude of the magnetic field.

Inventors: 
Pulskamp, Jeffrey S.
Patent Number: 
Technical domain: 
Materials and Coatings
FIle Date: 
2005-09-15
Grant Date: 
2010-01-05
Grant time: 
1,573 days
Grant time percentile rank: 
28
Claim count percentile rank: 
5
Citations percentile rank: 
1
'Cited by' percentile rank: 
2
Assignee: 
US ARMY