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MEMS structure support and release mechanism

Patent image
ARL

A MEMS device and method comprising a MEMS structure adjacent to a SOI base; a sacrificial support operatively connecting the base to the MEMS structure; a suspension member operatively connecting the base to the MEMS structure, wherein the suspension member is longer than the sacrificial support; and an electrode operatively connected to the base. The device may further comprise a current pulse generator adapted to send a current pulse through the sacrificial support, wherein the current pulse causes the sacrificial support to detach from the MEMS structure. Moreover, the sacrificial support structures may be electrically resistive.

Inventors: 
Edelstein, Alan S.
Patent Number: 
Technical domain: 
Sensors and Measurement
FIle Date: 
2006-02-02
Grant Date: 
2010-02-02
Grant time: 
1,461 days
Grant time percentile rank: 
26
Claim count percentile rank: 
4
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US ARMY