Maryland's Defense Patent Database

The defense community in Maryland is an R&D powerhouse.

Use this database to see the innovative patents that are poised for commercialization.

System and method for optical interrogation of micro-mechanical sensors using microcavity interferometry

Patent image
NRL

A sensor and a method for sensing a change in mass of a reflective microbeam in a sensor, the sensor having a reflective layer disposed on a substrate and spaced apart from the reflective microbeam. The microbeam receives amplitude modulated laser energy at a first wavelength and is photothermally excited into resonance at the frequency of amplitude modulation, the reflective microbridge and the reflective layer receive optical energy at a second wavelength and reflect the optical energy toward a receiver. A change in reflectivity of the microbeam at different frequencies is determined. A change in reflectivity indicates a change in resonant frequency of the microbeam. Mass of the microbeam changes when a chemoselective material on the microbeam sorbs a target chemical.

Inventors: 
Stievater, Todd H.; Rabinovich, William S.; Houser, Eric J.; Stepnowski, Stanley V.; Mcgill, Andrew R.
Patent Number: 
Technical domain: 
Sensors and Measurement
FIle Date: 
2006-11-13
Grant Date: 
2010-03-09
Grant time: 
1,212 days
Grant time percentile rank: 
22
Claim count percentile rank: 
10
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US NAVY