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Large force and displacement piezoelectric MEMS lateral actuation

Patent image
CCDC ARL

A piezoelectric microelectromechanical systems (MEMS) actuator includes a silicon substrate; an actuator beam comprising a first end region connected to the silicon substrate and a second end region connected to a mechanically compliant spring assembly; a first electrode over the silicon substrate; a piezoelectric layer above the first electrode; a second electrode over the piezoelectric layer; a conductive top structural layer above the second electrode, wherein a center half of the actuator beam is configured as a positive deflection region, and wherein both the first electrode and the second electrode supply voltage to both positive and negative deflection regions of the actuator beam.

Inventors: 
Pulskamp, Jeffrey Spencer; Polcawich, Ronald G.
Patent Number: 
Technical domain: 
Electronics and Energy
FIle Date: 
2008-08-21
Grant Date: 
2011-01-25
Grant time: 
887 days
Grant time percentile rank: 
16
Claim count percentile rank: 
3
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US ARMY