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MEMS oscillating magnetic sensor and method of making

Patent image
CCDC ARL

A microelectromechanical system (MEMS) device for sensing a magnetic field comprising: a base; a cantilever attached to the base structure at a first end and movable at a second end, the second end oscillating at a predetermined frequency upon application of a current; a magnetic sensor attached to the movable second end; at least one flux concentrator mounted on the base adapted to transfer magnetic flux to the sensor; whereby when the current is applied, the oscillation of the cantilever causes the sensor to oscillate between the lines of flux transferred from the at least one flux concentrator resulting in the shift of the frequency of the sensed magnetic field to the predetermined frequency. The invention further comprises a method of making the MEMS device.

Inventors: 
Fischer, Gregory Alexander; Fine, Jonathan Elliott; Edelstein, Alan Shane
Patent Number: 
Technical domain: 
Sensors and Measurement
FIle Date: 
2010-08-11
Grant Date: 
2012-10-02
Grant time: 
783 days
Grant time percentile rank: 
14
Claim count percentile rank: 
4
Citations percentile rank: 
2
'Cited by' percentile rank: 
2
Assignee: 
US ARMY