Maryland's Defense Patent Database

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Gray-tone lithography using optical diffusers

Patent image
NRL

A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist.

Inventors: 
Christophersen, Marc; Phlips, Bernard
Patent Number: 
Technical domain: 
Optics
FIle Date: 
2008-08-21
Grant Date: 
2013-02-12
Grant time: 
1,636 days
Grant time percentile rank: 
30
Claim count percentile rank: 
5
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US NAVY