Maryland's Defense Patent Database

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Micromechanical chemical sensors with multiple chemoselective resonant elements and frequency division multiplexed readout

Patent image
NRL

Micro-opto-mechanical chemical sensors and methods for simultaneously detecting and discriminating between a variety of vapor-phase analytes. One embodiment of the sensor is a photonic microharp chemical sensor with an array of closely spaced microbridges, each differing slightly in length and coated with a different sorbent polymer. The microbridges can be excited photothermally, and the microbridges can be optically interrogated using microcavity interferometry. Other actuation methods include piezoelectric, piezoresistive, electrothermal, and magnetic. Other read-out techniques include using a lever arm and other interferometric techniques.

Inventors: 
Stievater, Todd H.; Rabinovich, William S.; Papanicolaou, Nicolas A.; Bass, Robert; Stepnowski, Jennifer L.; Mcgill, Andrew R.
Patent Number: 
Technical domain: 
Sensors and Measurement
FIle Date: 
2009-09-29
Grant Date: 
2013-06-11
Grant time: 
1,351 days
Grant time percentile rank: 
24
Claim count percentile rank: 
7
Citations percentile rank: 
2
'Cited by' percentile rank: 
1
Assignee: 
US NAVY