Tracking carbon to silicon ratio <i>in situ </i>during silicon carbide growth
NRL
A method of: supplying sources of carbon and silicon into a chemical vapor deposition chamber; collecting exhaust gases from the chamber; performing mass spectrometry on the exhaust gases; and correlating a partial pressure of a carbon species in the exhaust gases to a carbon:silicon ratio in the chamber.
Inventors:
Vanmil, Brenda L.; Lew, Kok-keong; Myers-ward, Rachael L.; Eddy Jr., Charles R.; Gaskill, David Kurt
Patent Number:
Technical domain:
Materials and Coatings
FIle Date:
2008-07-31
Grant Date:
2013-12-10
Grant time:
1,958 days
Grant time percentile rank:
36
Claim count percentile rank:
3
Citations percentile rank:
1
'Cited by' percentile rank:
1
Assignee:
US NAVY
