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Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making

Patent image
ARL

A method for forming an electrical device having a {100}-textured platinum electrode comprising: depositing a textured metal thin film onto a substrate; thermally oxidizing the metal thin film by annealing to convert it to a rocksalt structure oxide with a {100}-texture; depositing a platinum film layer; depositing a ferroelectric film. An electrical device comprising a substrate; a textured layer formed on the substrate comprising metal oxide having a rocksalt structure; a first electrode film layer having a crystallographic texture acting as a template; and at least one ferroelectric material layer exhibiting spontaneous polarization epitaxially deposited on the first electrode film layer whereby the rocksalt structure of the textured layer facilitates the growth of the first electrode film layer with a {100} orientation which forms a template for the epitaxial deposition of the ferroelectric layer such that the ferroelectric layer is formed with an {001} orientation.

Inventors: 
Fox, Glen R.; Polcawich, Ronald G.; Potrepka, Daniel M.
Patent Number: 
Technical domain: 
Materials and Coatings
FIle Date: 
2012-06-05
Grant Date: 
2014-10-21
Grant time: 
868 days
Grant time percentile rank: 
15
Claim count percentile rank: 
6
Citations percentile rank: 
6
'Cited by' percentile rank: 
1
Assignee: 
US ARMY