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Apparatus and method for sputter-deposited coatings on fluidized particle beds

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CCDC ARL

A method and an apparatus for producing metal and ceramic coatings on a fluidized bed of particles or fibers are described. The method utilizes a unique apparatus to transfer vibratory motion through a wall of a deposition chamber in order to produce a fluidized bed of particle or fluidized bed of fibers inside the chamber. The method and apparatus are versatile, allowing particles of different shapes, sizes, materials and masses to be fluidized and coated. The fluidization process allows uniform and conformal coatings on particles and fibers. Coatings of pure metals, alloys, or ceramic materials can be produced.

Inventors: 
Baechle, Daniel Murphy; Wetzel, Eric D.
Patent Number: 
Technical domain: 
Materials and Coatings
FIle Date: 
2013-04-15
Grant Date: 
2016-07-19
Grant time: 
1,191 days
Grant time percentile rank: 
21
Claim count percentile rank: 
7
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US ARMY