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Perforated contact electrode on vertical nanowire array

Patent image
NRL

Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations.

Inventors: 
Pehrsson, Pehr E.; Field, Chistopher; In, Hyun Jin
Patent Number: 
Technical domain: 
Materials and Coatings
FIle Date: 
2011-11-10
Grant Date: 
2016-08-23
Grant time: 
1,748 days
Grant time percentile rank: 
32
Claim count percentile rank: 
3
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US NAVY